JPS6292640U - - Google Patents
Info
- Publication number
- JPS6292640U JPS6292640U JP18502185U JP18502185U JPS6292640U JP S6292640 U JPS6292640 U JP S6292640U JP 18502185 U JP18502185 U JP 18502185U JP 18502185 U JP18502185 U JP 18502185U JP S6292640 U JPS6292640 U JP S6292640U
- Authority
- JP
- Japan
- Prior art keywords
- container
- seal
- resist
- resist supply
- supply container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18502185U JPS6292640U (en]) | 1985-11-29 | 1985-11-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18502185U JPS6292640U (en]) | 1985-11-29 | 1985-11-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6292640U true JPS6292640U (en]) | 1987-06-13 |
Family
ID=31133257
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18502185U Pending JPS6292640U (en]) | 1985-11-29 | 1985-11-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6292640U (en]) |
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1985
- 1985-11-29 JP JP18502185U patent/JPS6292640U/ja active Pending